Experiments on a magnetically levitated planar actuator
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چکیده
Magnetically levitated planar actuators are developed as alternatives to xy-drives constructed of stacked linear motors. Although the translator of these ironless planar actuators can move over relatively large distances in the xy-plane only, it has to be controlled in six degrees-of-freedom (DOF) because of the active magnetic bearing. The advantage of magnetically levitated planar actuators is that they can operate in vacuum, for example in extreme-UV lithography equipment. Planar actuators can be constructed in two ways. The actuator has either moving coils and stationary magnets or moving magnets and stationary coils (Jansen, J.W. et al. 2007a). The last type of planar actuator does not require a cable to the moving part. However, only the coils underneath the translator can significantly contribute to its levitation and propulsion. Therefore, the set of active coils needs to change with the position of the translator during movements in the xyplane. A special commutation strategy called direct wrench-current decoupling has been derived which allows for switching between different active sets of coils without influencing the decoupling of the force and torque components (Lierop, C.M.M. van et al. 2006, Lierop, C.M.M. van et al. 2007). Due to the switching and the need to decouple both the force and Figure 1. a) Magnet array (bottom view). b) Overview of the planar actuator with sensor frame.
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تاریخ انتشار 2009